Table 3.
Summary of typical TPP-fabricated 3D microactuators.
| Driving Method | Shape and Fabrication Method | Response Time | Application | ||||
|---|---|---|---|---|---|---|---|
| Shape | Feature Size | Fabrication | |||||
| (μm) | Method | Material | Time | ||||
| Magnetic | Helix [41] | 10 × 8.5 × 2 | DLW | SU-8/IP-L | - | Real time | Delivery |
| Helix [69] | 16 × 5 × 2 | DLW | IP-L | - | |||
| Helix [70] | 10 × 5 × 1.5 | DLW | IP-L | - | |||
| Screw [71] | 70 × 40 × 5 | DLW | TMPETA | - | |||
| Hollow helix [72] | 75 × 15 × 5 | FE-DLW | SZ2080 | 10 s | |||
| Tube [73] | 80 × 25 × 1 | FE-DLW | SZ2080 | 10 s | |||
| Light | Gear [82] | 20 × 20 × 2 | DLW | - | - | - | Photonic |
| Cantilever [83] | 50 × 16 × 1.5 | DLW | NIPAM-gel | - | 0.03 s | - | |
| Gripper [84] | 60 × 60 × 1.5 | DLW | LCE | - | 2 s | - | |
| pH | Tuber [85] | 50 × 10 × 3 | FE-DLW | Hydrogel | 10 s | <1 s | Microfluidic |
| Tuber [86] | 50 × 10 × 3 | FE-DLW | 10 s | Trapping | |||
| Cantilever [24] | 60 × 10 × 2 | DLW | 0.5 h | - | |||
| Flower/Cage [87] | 60 × 15 × 3 | DLW | 0.5 h | Trapping | |||
| Microforce | Pillar [91] | 6 × 0.8 × 0.8 | DLW | SZ2080 | 1 s | 1 s | Trapping |
| Gripper [93] | 50 × 50 × 60 | DLW | IP-Dip | - | Real time | Trapping | |
| Gear [94] | 3 × 15 × 15 | MF-DLW | SU-8 | ~0.5 h | 10 s | - | |
| Heat | Cantilever [96] | 70 × 5 × 10 | DLW | pNIPAM | - | - | - |
| Flower [97] | 6 × 70 × 70 | DLW | CLC | - | - | Photonic | |
| Solution | Rocket [102] | 10 × 20 × 0.5 | DLW | IP-L | - | - | - |
| Flower [97] | 6 × 70 × 70 | DLW | CLC | - | ~5 s | Photonic | |
| Acoustic | Cantilever [109] | 50 × 16 × 1.5 | DLW | SU-8 | - | Real time | Sensor |
| Electric | - | - | - | - | |||
DLW: direct laser writing; MF-DLW: multi-foci direct laser writing; FE-DLW: field exposure + direct laser writing. LCE: liquid crystalline elastomer; CLC: supramolecular cholesteric liquid crystals.