Table 1. Sputtering target, substrate temperature T sub, film composition and measurements for all the thin-film samples.
NI and GI denote normal incidence and grazing incidence, respectively. The notations s1 and s2 mean two identical thin-film samples, and p1 and p2 mean two half pieces from one film sample.
| Film sample | Target | T sub | Film composition (at%) | Measurement | ||
|---|---|---|---|---|---|---|
| Zn | Sb | Ag | ||||
| ZSA1_RT | Ad1 | RT | 55.3 (6) | 42.4 (5) | 2.3 (1) | XRD |
| ZSA1_ 373K | Ad1 | 373 K | Near identical to ZSA1_RT | XRD | ||
| ZSA1_423K | Ad1 | 423 K | Near identical to ZSA1_RT | (p1) XRD + (p2) GI-PDF | ||
| ZSA1_473K | Ad1 | 473 K | Near identical to ZSA1_RT | XRD | ||
| ZSA2 (s1) | Ad2 | RT | 42.8 (4) | 55.0 (5) | 2.2 (1) | XRD |
| ZSA2 (s2) | Ad2 | RT | 43.2 (4) | 54.5 (3) | 2.3 (1) | GI-PDF |
| ZSA3 (s1) | Ad3 | RT | 42.8 (3) | 54.6 (2) | 2.5 (1) | XRD |
| ZSA3 (s2) | Ad3 | RT | Near identical to ZSA3 (s1) | GI-PDF | ||
| ZS1 | Ud1 | RT | 46.6 (4) | 53.4 (4) | – | XRD |
| ZS2 (s1) | Ud2 | RT | 39.8 (5) | 60.2 (5) | – | XRD |
| ZS2 (s2) | Ud2 | RT | 39.3 (3) | 60.7 (3) | – | NI-PDF with resistivity |
| ZS3_373K | Ud3 | 373 K | 51.5 (2) | 48.5 (2) | – | NI-PDF with resistivity |
| ZS3_RT | Ud3 | RT | 50.9 (2) | 49.1 (2) | – | XRD |