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. 2021 May 13;11:10218. doi: 10.1038/s41598-021-87712-y

Figure 2.

Figure 2

Scanning electron microscope (SEM) image of polyimide substrate (65º tilt angle) to highlight how the vias are fabricated by increasing the scribing laser power to ‘punch’ through the substrate and create an electrically conducting through-connection.