Table 1.
Specific parameters of laser scriber (MFP-20).
| Parameter | Wavelength (nm) | Laser Power (W) |
Scan Speed (mm/s) |
Beam Diameter (μm) |
Frequency (kHz) |
|---|---|---|---|---|---|
| Data | 1064 ± 4 | 1–20 | 0–1500 | 6–9 | 30–60 |
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