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AFM height (amplitude) images and cross-section profiles along the corresponding lines (2.5 × 2.5 µm2 size, Z scale is 50 nm) of PS film irradiated at 266 nm, at a repetition rate of 50 Hz, a fluence of 11.8 mJ/cm2, after 35 × 103 pulses: (a) area 1, (b) area 2, and (c) SEM image. The polarization direction of the laser beam is indicated by double arrows.
