Figure 5.

SEM images of PS film irradiated at λ = 266 nm,1 kHz of repetition rate and pulse fluence F = 0.6 m${\mathrm{J}/\mathrm{cm}}^2$ with 10⁵ pulses at (a) 23.5 °C, (b) 40 °C, (c) 60 °C, and (d) 97 °C. (e) AFM height image (2.5 × 2.5 µm² size) of PS film irradiated at 266 nm, 1 kHz of repetition rate with number of pulses N = 100 × 10³ at 97 °C, and cross-section profile along the white line.