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Production of DRAM divided into three process modules from which system boundaries of the LCA study can be selected [49]. Energy and Buildings, Volume 56, Shih-Cheng Hu, Angus Shiue, Hsien-Chou Chuang, Tengfang Xu, Life cycle assessment of high-technology buildings: Energy consumption and associated environmental impacts of wafer fabrication plants, Pages 126–133, Copyright (2013), with permission from Elsevier [49].
