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Scheme of the laminated structure with a lateral opening: (a) in situ n+-Si/i-SiGe/p+-Si; (b) i-Si/i-SiGe/p+-Si; (c) implanted n+-Si/i-SiGe/p+-Si; (d) SiGe/Si multilayers with different doping types; (e) SiGe/Si multilayers with different Ge fractions.
