Table 5.
Checkpoint Conditions X1/X2 | Y1 (nm) | Y2 (%) | ||||
---|---|---|---|---|---|---|
Observed | Predicted | Error (%) | Observed | Predicted | Error (%) | |
12/8 | 156.6 | 165.5 | 5.38 | 74.6 | 76.5 | 2.46 |
10/6.5 | 232.6 | 259.8 | 4.05 | 63.5 | 65.8 | 3.44 |
12/5 | 212.9 | 226.8 | 6.17 | 69.4 | 66.0 | −5.13 |
8/8 | 365.5 | 352.1 | −3.79 | 65.3 | 61.4 | −6.33 |
8/5 | 614.6 | 590.8 | −4.02 | 41.6 | 43.8 | 5.12 |