Table 2.

Extracted thermophysical properties in comparison to literature values. Thermal conductivity is calculated based on thermal diffusivity and effusivity.

Material	Substrate	Thermal diffusivity D [×10−6 m2 s−1]	Thermal effusivity ε [W s0.5 m−2 K−1]	Thermal conductivity k [W m−1 K−1]
Silicon dioxide
Literature valuesa		0.87	1503	1.4
l = 5 μm	Silicon	0.809 ± 0.013	1560 ± 49	1.40 ± 0.05
PMMA
Literature values		0.12b	522c	0.18
l = 370 ± 19 nm	Quartz	0.146 ± 0.024	490 ± 26	0.188 ± 0.019
l = 1095 ± 55 nm	Quartz	0.119 ± 0.013	507 ± 8	0.175 ± 0.010
l = 3096 ± 155 nm	Quartz	0.112 ± 0.012	540 ± 10	0.181 ± 0.010
l = 1120 ± 56 nm	Steel	0.117 ± 0.012	552 ± 11	0.189 ± 0.011
l = 1075 ± 54 nm	Silicon	0.111 ± 0.012	509 ± 26	0.169 ± 0.013

^aValues are taken from Ref. [18].

^bValue is taken from Ref. [27].

^cValue is taken from Ref. [28].