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. 2021 May 25;11:10892. doi: 10.1038/s41598-021-90445-7

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© The Author(s) 2021

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.

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(a) Optical microscope images of the fabricated microstructure with different numbers of laser scans. The scale bar indicates 10 µm. (b) Dependence of line width of the fabricated microstructure on the number of laser scans. The laser power and scanning speed were 20 mW and 125 µm/s, respectively. The line widths of the fabricated microstructures were measured at five locations, and the average value was plotted with the standard error.