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. 2021 May 25;12:3141. doi: 10.1038/s41467-021-23256-z

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© The Author(s) 2021

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — a Diagram showing the concept of Tx and Rx operating modes of ME antenna, where the top and bottom rectangular boxes represent the magnetostrctive and piezoelectric layers, respectively; b 3D schematic of the ME antenna on released Si substrate. The yellow color indicates a gold ground ring and GSG pads that are used for probing and wire-bonding the antenna to PCB; c exploded structure of the ME antenna showing all the layers.