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. 2021 May 14;21(10):3423. doi: 10.3390/s21103423

Table 2.

Material deposition methods, sensing technologies, sensor performance parameters and operating temperatures with various sensing materials and target analytes in gas phase.

Sensing
Material
Target
Analyte
Sensing
Technology
Deposition
Method
Material
Thickness
Dynamic Range &
Limit of Detection
Recovery
Time
Operating
Temperature
Long-Term
Stability
Sensitivity
(Output/Input)
Refs.
BMIM-NTf2 Ethylene Amperometric Drop-coating 63 µm 760 ppb–10 ppm - 22 °C - 51 pA/ppm [35]
Porous ZnO NS Ethylene Chemiresistive Dip-coating 10 nm 5–2000 ppm 20 s 350–500 °C 30 days 0.6 µA/ppm [43]
LaFeO3 Ethylene Chemiresistive Screen printing 37–38.3 µm 25–5000 ppm ~1 s 20–200 °C - 0.4 Ω/ppm [80,81]
SWCNTs Ethylene Chemiresistive - 1 µL 0.5–50 ppm - 4 °C 16 days 1.2%R/ppm [45]
SnO2 nanoparticles Ethylene Chemicapacitive Dip-coating/Sputtering 1300 nm 20–100 ppm ~10 s 22 °C - 0.0531 pF/ppm [27]
PtTiO2 Ethylene Magnetoelastic Dip-Coating 31–155 nm 0.5–50 ppm - 19 °C - 8.5 Hz/ppm [44]
ZnO CO2 Chemiresistive Spray pyrolysis 8.3 nm 50–1000 ppm 100 s 300 °C - 800 Ω/ppm [48]
PEDOT PSS/graphene CO2 Chemiresistive Calibrated spreader 10 µm 4.7–4500 ppm - 35–65 °C - 0.004–0.0047%R/%RH [51]
TiO2 coated g-C3N4 NS CO2 Chemiresistive Drop-coating 30 nm 100–2500 ppm 35 s 22 °C 60 days 406 μΩ/ppm [50]
CeO2 CO2 Chemiresistive Drop-coating 170–210 nm diam. 150–2400 ppm ~1 s 100–250 °C - 4.88 kΩ/ppm [49]
EMIM[NTF2] CO2 Chemicapacitive Dip-coating <1 µm 50,000–1,000,000 ppm 38.5 s Room temperature - 29 pF/ppm [52]
HPTS CO2 Fibre-Optic Dip-coating >1 µm 300–300,000 ppm 50–100 s 22 °C - 0.00055 a.u./ppm [54]
mPEI CO2 Resonator Spin coating - 0.011% - - - 8 Hz/ppm [29]
CuO,Fe2O3 H2S Amperometric - - 10ppm - −15 °C–65 °C - 700 µA/ppm [57]
CNTs/SnO2/CuO H2S Chemiresistive Spin-coating >6 nm 10–80 ppm 10 min 25 °C - 4.41 Ω/ppm [32]
SnO2 nanofibres H2S Chemiresistive Electro-spinning 150 nm diam. 0.1–1 ppm 230 s 200–350 °C - 970 kΩ/ppm [56]
Zn2SnO4 NS H2S Chemiresistive Dip-coating 100 nm 5–1000 ppb 1300 s 133–170 °C 60 days 1.08 MΩ/ppb [59]
In2O3 H2S Chemiresistive Dip-coating 100 um 5 ppb 5  min 25–100 °C 30 days 13.02 kΩ/ppm [55]
WO3, PPy H2S Chemiresistive - 50–100 nm 200 ppm >1 day 90 °C - 490 µV/ppm [58]
SWCNTs H2S Chemiresistive Spin-coating 1–2 nm diam. 5 ppm–150 ppm 10–15 s 20 °C - 0.47%R/ppm [61]
ZnO Nanowires Ethanol Chemiresistive Spin-coating 25 nm diam. 1–200 ppm 120 s 300 °C - 644 Ω/ppm [82]
SnS Ethanol Chemiresistive - - 10 ppm 9 s 200 °C 6 weeks 0.27–13.5%R/ppm [63]
Pd/TiO2 Ethanol Chemicapacitive Nanorod growth 710–750 nm 1–100 ppm 2.4–3.8 s 100 °C - 7.5%C/ppm [62]
SiO2/Si NW Ethanol MGFET vapor-liquid-sold growth 16 nm diam. 26–2000 ppm 4 min 60 °C - 16–40 pA/ppm [64,83]
PSAA Ethanol Resonator Drop-coating 19.9 nm 13.3 ppm 20 min 24 °C - 1.5 Hz/ppm [84]
CuO particles Water Vapor Chemiresistive Drop-coating 140 µm 33–90%RH - 22 °C - 0.5– 30 kΩ/%RH [67]
WS2 NS Water Vapor Chemiresistive Drop-coating 6 nm 8–85%RH 30–140 s - several weeks 580 MΩ/%RH [75]
MWCNTs-CS Water Vapor Chemiresistive - - 11–95%RH - Room temperature - 2.4 mΩ/%RH [68]
MWCNTs-PLL Water Vapor Chemiresistive Drop-coating - 0–91.5%RH - Room temperature - 3.78 kΩ/%RH [68]
MoS2/ND Water Vapor Chemicapacitive - - 11–97%RH - Room temperature - 6.5 nF/%RH [74]
SPEEK Water Vapor Impedance-based Drop-coating 20 µm 11–95%RH 130 s 22 °C 30 days 12– 120 MΩ/%RH [85]
TiO2 Nanowires Water Vapor Impedance-based Dip-coating 40–50 nm 12–97%RH <2 min 17–35 °C 250 days 144 kΩ/%RH [86]
Silica/di-ureasil FBG Water Vapor Fibre-Optic Dip-coating 450–591 µm 5–95%RH - 5–40 °C 1 year 1.25–7.14 pm/%RH [87]
PI Water Vapor Fibre-Optic Dip-coating 450–591 µm 5-95%RH - −15–20 °C - 1.85–2.25 pm/%RH [88]
Al2O3 +/PSS nano-film Water Vapor Fibre-Optic ESA 84nm 22–39%RH - 24.5 °C - 1.43 nm/%RH [89]
SiO2 Water Vapor Fibre-Optic ESA  300 nm 20–80%RH 150ms 10–40 °C - 67.33–451.78 pm/%RH [90]
CaCl2 Water Vapor Fibre-Optic - 3 µm 55–95%RH - 30 °C - 1.36 nm/%RH [91]
CoCl2 Water Vapor Fibre-Optic Drop-coating 10 µm 50–95%RH ~40 s 25 °C - 67–200 pm/%RH [92]
HEC/PVDF Water Vapor Fibre-Optic Dip-impregnation - 40–90%RH - 28 °C - 0.196 dB/%RH [93]
PAA Nanowires Water Vapor Fibre-Optic Electrospinning - 30–95%RH 210 ms 25 °C - 0.01 dB/%RH [94]
ZnO Nanorods Water Vapor Fibre-Optic Dip-coating 2.5 µm 10–95%RH - 25 °C - 0.0007–0.0057%P/%RH [95]
PVA Water Vapor Fibre-Optic Dip-coating 8 µm 20–95%RH 500 ms 20–100 °C 7 days 25–980 pm/%RH [72,96,97,98]
PEO Water Vapor Fibre-Optic Dip-coating - 85–90%RH ~1 s 22 °C - 1.17 dB/%RH [99]
Silica/methylene blue Water Vapor Fibre-Optic Dip-coating - 1.1-4.1%RH <30 s 18 °C - 0.0087 a.u./%RH [100]
Ag-Polyaniline Water Vapor Fibre-Optic Dip-coating 15–30 nm diam. 5-95%RH 90s 25–30 °C - 10–29 mV/%RH [101]
PGA/poly-lysine Water Vapor Fibre-Optic Soaked in polymer  1 µm 50–92.9%RH 5.8 s - - 0.01 dBm/%RH [102]
ZnO Water Vapor Fibre-Optic Dip/Spin-coating 70–80 nm diam. 5–50%RH 35 s 22 °C - 0.45%dB/%RH [103]
Co/Polyaniline Water Vapor Fibre-Optic Dip-coating  10.4 µm 20–92%RH 1 min 30 °C - 0.024–3.406 mV/%RH [104]
Gelatin Water Vapor Fibre-Optic Dip-coating 80 nm 9–94%RH ~50 s 22 °C - 0.167 dBm/%RH [105]
Chitosan Water Vapor Fibre-Optic Dip-coating - 20–80%RH - 25 °C - 81 pm/%RH [106]