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Comparison of Reconstructed Results With True Results for Linewidth Array With Hemispherical Bumps.
| Parameters | True (nm) | Package A (nm) | Errors, Package A (Result—True) (nm) |
|---|---|---|---|
| Height (Hbumpy) | 60 | 36.6 ± 2.0 | − 23.4 ± 2.0 |
| Linewidth (LWbumpy) at 0.5 Hbumpy_mean | 60 | 55 ± 0.4 | − 5 ± 0.4 |
| Trenchwidth (TWbumpy) at 0.5 Hbumpy_mean | 40 | 45 ± 0.2 | 5 ± 0.2 |
| Pitch (Pbumpy) at 0.5 Hbumpy_mean | 100 | 100 ± 0.4 | 0 ± 0.4 |
