Table 4.

Summary of Comparison of Reconstructed Values With the True Ones.

Figures	Parameters	Package A	Package B
Figures 2b–2d	Hrough	“a”	“a”
Linewidth structure with rough surface	LWrough	“a”	“a”
Figures 3b–3d	Hsmooth	− 46%	− 46.3%
Linewidth array with smooth surface	LWsmooth	“a”	− 37.6%
	TWsmooth	“a”	56.8%
	Psmooth	“a”	“a”
Figures 9a–9c	Hbumpy	− 39%
Linewidth array with hemispherical bumps	LWbumpy	− 8.3%
	TWbumpy	12.5%
	Pbumpy	“a”

The letter “a” designates values in agreement with the true value to within the stated uncertainty. Otherwise, the discrepancy is calculated.