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a) Multilayer deposition of Ga2O3 and co‐sputtered Li2O+LLZ layers which react to cubic LLZ after annealing at 700 °C. Reproduced with permission.[ 54 ] Copyright 2018, American Chemical Society. b) Sputter deposition of garnet structured thin films on steel substrate at 700 °C leads to interlayer formation. Reproduced with permission.[ 56 ] Copyright 2016, Elsevier.
