Figure 13.

a) Impedance spectra of thin‐film batteries with Li₃PO₄ or LiPON electrolytes deposited under different deposition conditions: On‐axis in Ar atmosphere (upper left), on‐axis in N₂‐atmosphere (upper right), 1500 nm thin film in off‐axis configuration (lower left) and 100 nm in off‐axis configuration (lower right). Reproduced with permission.^{[ 201 ]} Copyright 2015, American Chemical Society. b) Schematic illustration of LiPON‐LiCoO₂ interface—after deposition (upper part) and after annealing (lower part). Reproduced with permission.^{[ 203 ]} Copyright 2017, American Chemical Society.