FIB	Focused Ion Beam
SEM	Scanning Electron Microscope
GIS	Gas Injection System
TEM	Transmission Electron Microscope
Si	Silicon
PolySi	Polysilicon
Pt	Platinum
C	Carbon
PtC	Platinum Carbon
C-H	Carbon-hydrogen
Ga	Gallium
DLC	Diamond Like Carbon
Au	Gold
BMM	Bulk Micro-Machining
SMM	Surface Micro-Machining
SOI	Silicon on Insulator
MEMS	Microelectromechanical System
TNEA	Thermal Noise Equivalent Acceleration
PCB	Printed Circuit Board
SMU	Source Measurement Unit
VdW	Van der Waals
FEM	Finite Element Method
n/a	not available
calc.	calculated
GND	Ground
FFC/FPC	Flexible Flat Cable/ Flexible Printed Circuit