Table 1.
Parameters of the proposed structure (μm).
| Parameter | Size | Parameters | Size | Parameter | Size |
|---|---|---|---|---|---|
| d 1 | 0.18 | d 5 | 0.2 | l 1 | 1.05 |
| d 2 | 0.26 | l 1 | 5.4 | h 1 | 2.15 |
| d 3 | 0.5 | l 2 | 5.25 | h 2 | 2 |
| d 4 | 0.5 | l 3 | 1.8 | h 3 | 2.5 |
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