| DCMS | Direct current magnetron sputtering |
| EDX | Energy dispersive X-ray spectroscopy |
| GIXD | Grazing incidence X-ray diffraction |
| HAADF | High-angle annular dark field |
| HiPIMS | High power impulse magnetron sputtering |
| HRTEM | High resolution TEM |
| SAED | Selected area electron diffraction |
| TEM | Transmission electron microscopy |
| XPS | X-ray photoelectron spectroscopy |
| XRD | X-ray diffraction |
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