Table 1.
Sample | Strain Calculated by HRXRD | Strain Calculated by TEM | Ge PL Position | Extracted TDD in Ge by TEM (cm−2) |
---|---|---|---|---|
Global Ge | +0.25% | +0.35% | 0.768 eV | 2.9 × 107 |
SEG Ge | +0.25% −0.12% | +0.35% −0.34% | 0.781 eV | 3.2 × 105 |
Sample | Strain Calculated by HRXRD | Strain Calculated by TEM | Ge PL Position | Extracted TDD in Ge by TEM (cm−2) |
---|---|---|---|---|
Global Ge | +0.25% | +0.35% | 0.768 eV | 2.9 × 107 |
SEG Ge | +0.25% −0.12% | +0.35% −0.34% | 0.781 eV | 3.2 × 105 |