Table 1.
Parameters | Values |
---|---|
Energy of electrons (keV) | 27 |
Pulse duration (μs) | 2–4 |
Number of pulses | 10 |
Beam energy density (J/cm2) | 3.5 |
Pulse frequency (Hz) | 0.2 |
Ar pressure (Pa) | 0.02 |
Parameters | Values |
---|---|
Energy of electrons (keV) | 27 |
Pulse duration (μs) | 2–4 |
Number of pulses | 10 |
Beam energy density (J/cm2) | 3.5 |
Pulse frequency (Hz) | 0.2 |
Ar pressure (Pa) | 0.02 |