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(a) MEMS gas sensor array fabricated by EHD printing of SnO2, WO3 and In2O3 nanofibers for low power consumption. The platform size is 3.5 × 3.5 mm. The configuration and SEM image of the individual element are also given here. (b–d) SEM images of nanofiber materials integrated on the suspended MEMS platform by EHD printing. Reprinted with permission from [372]. Copyright 2017 Elsevier.
