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SEM image of single/double-clamped resonator. (a) Polymeric cantilevers (width 600 µm). Adapted with permission from [42]. (b) Silicon nanowires grown in micro trenches. Bottom left image: nanowires with a width of 600 nm are epitaxially grown along the <111> direction; bottom right image: hexagonal cross-section of silicon nanowire. Adapted with permission from [32].
