Figure 3.

In-situ manufacturing and testing system of resonator and stretching process to manufacture MEMS resonator. (a) Schematic of particle deposition and in-situ measurement in a scanning electron microscope. Adapted with permission from [34]. (b) Schematic of the preform to fiber drawing process. Adapted with permission from [31]. (c) Flexible electrostrictive fiber array displays color reflection through the Bragg effect. Adapted with permission from [31].