Table 1.

Resonance performance, application, and excitation/detection methods of resonators with different structures.

Structure	Material	Dimension	Frequency	Quality Factor	Excitation/Detection	Application	Reference
Double-clamped	Carbon nanotubes	$1005.9\mathsf{\mu }\mathrm{m}\left(\mathrm{l}\right)$	500 Hz		acoustic drive	Anti-fatigue property	Ref [35]
	${\mathrm{VO}}_2$	$100\left(\mathrm{l}\right)\times 5\left(w\right)\mathsf{\mu }\mathrm{m}$	32.6 kHz		electric drive	Self oscillation	Ref [92]
	Pyrolytic carbon	$400\left(\mathrm{l}\right)\times 30\left(w\right)\times 0.6\left(t\right)$µm	233$\pm 4\mathrm{KHz}$		electric drive/detection	MTA	Ref [65]
	Si		352.2 KHz	30,160	differential drive	Accelerometer	Ref [120]
	Si	$800\left(\mathrm{l}\right)\times 280\left(w\right)\mathrm{nm}$	1.26 MHz		electric drive	Self oscillation	Ref [91]
	Carbon nanotubes	$4\mathsf{\mu }\mathrm{m}\left(\mathrm{l}\right)$	4.2 MHz	48,000	electrostatic drive /mixing detection	Force sensing	Ref [56]
	h-BN	6.7 nm (t)	$14.06\mathrm{MHz}$	39	thermodynamic fluctuation	Resonator	Ref [121]
	Carbon nanotubes	$1\mathsf{\mu }\mathrm{m}\left(\mathrm{l}\right)$	46–51.5 MHz		electric drive/detection	Energy loss	Ref [59]
	Si	$7.7\left(\mathrm{l}\right)\times 0.33\left(w\right)\times 0.8\left(t\right)\mathsf{\mu }\mathrm{m}$	70.72 MHz	$1.8\times {10}^4$	magnetomotive transduction	High frequency Resonator	Ref [36]
	Single-layer graphene	$1.1\left(\mathrm{l}\right)\times 1.93\left(w\right)\times 0.0003\left(t\right)\mathsf{\mu }\mathrm{m}$	70.5 MHz	78	optical drive	Resonator	Ref [122]
	Silicon nanowire	$1.8\left(\mathrm{l}\right)\times 0.04\left(t\right)\mathsf{\mu }\mathrm{m}$	96 MHz	5500	electric drive	Electromechanical system	Ref [40]
	GaAs	$3\left(\mathrm{l}\right)\times 0.25\left(w\right)\times 0.2\left(t\right)\mathsf{\mu }\mathrm{m}$	116.7 MHz	1700	SET detection	Quantum mechanics	Ref [70]
	Silicon nitride	$2\left(\mathrm{l}\right)\times 0.165\left(w\right)\times 0.125\left(t\right)\mathsf{\mu }\mathrm{m}$	145 MHz	400	laser drive/detection	Energy loss	Ref [33]
	SiC	$2.3\left(\mathrm{l}\right)\times 0.15\left(w\right)\times 0.1\left(t\right)\mathsf{\mu }\mathrm{m}$	190 MHz	5000	reflection bridge	Mass sensing	Ref [82]
	Silicon nanowire	$2.25\left(\mathrm{l}\right)\times 0.142\left(w\right)\mathsf{\mu }\mathrm{m}$	200 MHz	2000	magnetomotive transduction	High frequency resonator	Ref [32]
Single-clamped	${\mathrm{Fe}}_{0.7}{\mathrm{Ga}}_{0.3}$/PZT	$1000\left(\mathrm{l}\right)\times 200\left(w\right)\times 5\left(t\right)\mathsf{\mu }\mathrm{m}$	3.549 KHz	2500	electric/ magnetic drive	Resonance tuning	Ref [39]
	TP MH	$1000\left(\mathrm{l}\right)\times 65\left(w\right)\mathsf{\mu }\mathrm{m}$	$19\pm 3.8\mathrm{kHz}$		piezoelectric excitation	MTA	Ref [67]
	Carbon nanotubes	1–15 (l) μm	$57.04\mathrm{kHz}$	3000	optomechanical detection	Mass sensing	Ref [34]
	Pt-C	$5\left(\mathrm{l}\right)\mathsf{\mu }\mathrm{m}$	$662.5\mathrm{kHz}$.	$149\pm 13$	electrical detection	Original process	Ref [45]
	SiC nanowire	$10\left(\mathrm{l}\right)\times 0.05\left(d\right)\mathsf{\mu }\mathrm{m}$	1 MHz	10,000	optical detection	Spin coupling	Ref [79]
	Si	$7\left(\mathrm{l}\right)\times 0.2\left(w\right)\times 0.1\left(t\right)\mathsf{\mu }\mathrm{m}$	$1.12\mathrm{MHz}$	5000		Atomic spin	Ref [21]
	GaAs	$4\left(\mathrm{l}\right)\times 0.8\left(w\right)\times 0.2\left(t\right)\mathsf{\mu }\mathrm{m}$	8 MHz	2700	piezoelectric excitation	Resonance tuning	Ref [47]
	Porous nano cantilever	$4\left(\mathrm{l}\right)\times 0.130\left(w\right)\times 0.220\left(t\right)\mathsf{\mu }\mathrm{m}$	9.66 MHz			Mass sensing	Ref [88]
	Si	$5\left(\mathrm{l}\right)\times 0.3\mathsf{\mu }\mathrm{m}$	19.16 MHz	5000	electrical detection	Mass sensing	Ref [85,86]
	Si	5–10 (l) μm	20–120 MHz	7500–8500	electrical detection	Mass sensing	Ref [87]
	SiC	$0.6\left(\mathrm{l}\right)\times 0.4\left(w\right)\times 0.1\left(t\right)\mathsf{\mu }\mathrm{m}$	127 MHz	900	electrical detection	High frequency resonator	Ref [1]
	Carbon nanotubes	$205\left(\mathrm{l}\right)\times 1.78\left(d\right)\mathrm{nm}$	$328.5\mathrm{MHz}$	1000	radio signal detect	Mass sensing	Ref [81]
Hemispherical Shell	Metallic glasses	3 mm (d)	$13.944\mathrm{kHz}$	6200	optical detection	Gyroscope	Ref [13]
	Polycrystalline diamond	1.1 mm (d)	$18.316\mathrm{kHz}$	20,000	optical detection	Resonator	Ref [93]
Ring	Si	1–6 mm (r)	2163.8 Hz	510,000	electrostatic drive	Gyroscope	Ref [25]
	Si	$720\mathsf{\mu }\mathrm{m}$(d)	134.31 kHz		electrostatic drive	Resonator	Ref [27]
Microdisk	Diamond	$38\mathsf{\mu }\mathrm{m}$(d)	$9–30\mathrm{MHz}$	>${10}^4$	laser detection	Mass sensing	Ref [24]
	SiC	19.5$\mathsf{\mu }\mathrm{m}$(d)	10.14~16.48 $\mathrm{MHz}$	850~1360	laser detection	Multi-mode	Ref [14]
	GaAs	$1–3\mathsf{\mu }\mathrm{m}$(r)	1.3 GHz		optomechanical detection	Energy loss	Ref [97]
Drum	SiN	100 nm (t)	121.1 kHz	$5.3\times {10}^6$	optical interference	Octave frequency tuning	Ref [23]
	Graphene	285 nm (t)	13.92 MHz	416.6		High-frequency stochastic switch	Ref [26]
	Graphene	$4\mathsf{\mu }\mathrm{m}$(d)	52.19 MHz	55	electric drive	Oscillator	Ref [99]
	Graphene	$4\mathsf{\mu }\mathrm{m}$(d)	60–75 MHz	500–3000	optical detection	In plane stress detection	Ref [100]
Fork	Si		3 KHz	$6.8\times {10}^3$	optical levers detection	Resonator	Ref [115]
	Silicon nitride	$20\mathsf{\mu }\mathrm{m}\left(\mathrm{l}\right)$	$16.51\mathrm{MHz}$			Resonator	Ref [116]
SAW/BAW	Si		4.3 MHz	60,000	electrostatic excitation	Gyroscope	Ref [107]
	AlN	$1\mathsf{\mu }\mathrm{m}$(t)	106.69 MHz		electrical excitation	High-order harmonics	Ref [109]
	AlN/Au	500 nm (t)	161.4 MHz	1116	electrical excitation	Infrared detector	Ref [106]
	Graphene oxide/AlN	$1\mathsf{\mu }\mathrm{m}$(t)	226.3 MHz		transmission spectrum detection	Humidity sensor	Ref [105]
	AlN	$1\mathsf{\mu }\mathrm{m}$(t)	446 MHz	1500	RF excitation	Resonator	Ref [103]
	Diamond/ZnO	$10–20\mathsf{\mu }\mathrm{m}$(t)	3 GHz			Fast spin control	Ref [110]