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. Author manuscript; available in PMC: 2021 Jun 30.
Published in final edited form as: Small. 2008 Jul;4(7):920–924. doi: 10.1002/smll.200701089

Figure 4.

Figure 4.

Tapping-mode AFM, height profile, and optical images of A,C) circular holes and B,D) line trenches generated using the negative feature polymer-based etching methodology. The insets in (A) and (B) show the zoomed-in AFM images of the negative nanostructures.