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. 2021 Jul 3;14(13):3733. doi: 10.3390/ma14133733

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© 2021 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).

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The SIMS profiles of the Si epitaxial films obtained after ex-situ wet pre-cleaning with 1:200 DHF, dry cleaning, and combined wet + dry cleaning, indicating the concentrations of (a) O, (b) F, and (c) C.