Table 1.
Ref. | ||||||||
This work | 15 | 16 | 17 | 18 | 19 | 20 | 21 | |
Process | 130 nm BCD+MEMS | 1.5 µm HV | 28 nm | 180 nm HV SOI | 180 nm | 180 nm | 180 nm BCD SOI | 350 nm CMUT-in-CMOS |
Transducer | 2D CMUT | 2D CMUT | 2D CMUT | 2D PZT | 2D PZT | 2D PMUT | 2D CMUT | 2D CMUT |
No. of TX/RX elements | 8,960/8,960 | 256/256 | 0/16 | 128/3072 | 0/144 | 36/36 | 256/256 | 0/960 |
Operating frequency | 1–10 MHz | 5 MHz | 5 MHz | 5 MHz | 5 MHz | 5 MHz | 7 MHz | 5 MHz |
Pitch-matched | ✓ (208 µm) | × | ✓ (250 µm) | ✓ (300 µm) | ✓ (150 µm) | ✓ (250 µm) | ✓ (220 µm) | ✓ (162 µm) |
Multilevel pulsing | ✓ (7-level) | × | × | ✓ (3-level) | × | × | × | × |
TX beamforming | ✓ (digital) | ✓ (digital) | × | ✓ (digital) | × | × | × | × |
RX beamforming | ✓ (digital) | × | ✓ (digital) | ✓ (analog) | ✓ (analog) | ✓ (analog) | × | × |
On-chip TGC | ✓ (0.2 dB/step) | × | ✓ (0.33 dB/step) | × | ✓ (6 dB/step) | ✓ (6 dB/step) | × | ✓ (4.3 dB/step) |
On-chip ADC | ✓ (1,120 ch) | × | ✓ (16 ch) | × | ✓ (16 ch) | ✓ (36 ch) | × | × |
On-chip DSP | ✓ | × | × | × | × | × | × | × |