Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
SEM images of Si nanowall after pattern transfer. Top-down SEM images of Si nanowall structures following an ICP etch of the iron oxide hard mask for (a) 1 and (b) 3 min etch, with tilted images (70°) shown in (c,d), respectively. (e,f) Cross-sectional SEM image of Si nanowalls for samples (a,b).
