Table 1. Hardware overview.
| X | Y | Z | Rotation | |
|---|---|---|---|---|
| Range (mm) | ±15 | ±15 | 400 | 360°† |
| Resolution (nm) | 100 | 100 | 100 | 515 nrad |
| FWHM (nm) | 22 | 22 | 27 | 205 nrad |
| Eigenfrequency (Hz) | 48.5 | 48.5 | – | – |
| Motor‡ | PKP246 | PKP246 | PKP296 | ST4209M1704-A |
| Lead screws§ | BNK1002 | BNK1002 | DIK2004 | – |
| Gears¶ | – | – | 2:1 cogbelt | GPLE40-3S-256 + 3:1 cogbelt |
| Brake†† | – | – | MAB23x | – |
| Bearing‡‡ | VR6 300 | VR6 250 | SHS20LV | RNN250 |
| Encoder§§ | RL32BAT001 | RL32BAT001 | RL32BAT001 | RA32BAA150 |
†
Unlimited, but in reality limited by the tubes exiting on the top, typically 190°.
‡
Motors from Oriental and Nanotec.
§
All are THK brand.
¶
Cog drives are custom from Aratron, rotation gearbox is Nanotec.
††
JVL brand, only the Z-axis has been equipped with parking break due to its weight and vacuum force to prevent freefall in case of power out-take.
‡‡
All are THK brand, except rotation, which is Thermionics.
§§
All are absolute optical Renishaw encoders.