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Area percentages of metal–oxygen (M–O), oxygen vacancy (VO), hydroxyl (O–H), and silicon-oxygen (Si–O) peaks from deconvoluted O 1 s spectra.
| M–O (%) | VO (%) | O–H (%) | Si–O (%) | |||||
|---|---|---|---|---|---|---|---|---|
| Before UV | After UV | Before UV | After UV | Before UV | After UV | Before UV | After UV | |
| Top interface | 70 | 46 | 10 | 24 | 5 | 2 | 15 | 28 |
| Bulk | 91 | 88 | 7 | 11 | 2 | 1 | 0 | 0 |
| Bottom interface | 73 | 70 | 20 | 21 | 1 | 0 | 6 | 8 |
