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(a) A 2-axis electrostatic actuated parametrically-resonant MEMS scanner, (b, c) Phase delay variation near maximum amplitude scanning is substantial with small perturbations of natural frequency. Sample frequency response generated by methods from [16], [17], with nominal Jx =0.013 mg mm2, cx =0.003 μN-mm-s/rad, Kx =4860 μN-mm/rad, bx =0.0006 rad2, dx =0.003 μN-mm-rad, and corresponding linear natural frequency, fn, of 6405 Hz perturbed by adjusting Kx.
