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ICP sensors with different dimensions for sensitivity characterization.
| ICP Sensor Design | ||||
|---|---|---|---|---|
| W500-H100 | W500-H300 | W1000-H300 | ||
| Gallium structure design | Width (µm) | 500 | 500 | 1000 |
| Height (µm) | 100 | 300 | 300 | |
| Length (µm) | 4.55 × 105 | 4.55 × 105 | 4.55 × 105 | |
| Sensor thickness (µm) | 500 | 500 | 500 | |
