Figure 6.

SEM images of the microcontainer’s hollowed cubic base (a), and lid that contains a matrix of wells that exposes a thin nanoporous membrane at the base of the wells (b). The thin nanoporous membrane has a nanopore array which is shown magnified in panel (c). The nanopores (enlarged view, d) permit selective molecular transport through the membrane. Reprinted from Gimi et al. [51] with permission from Springer. (e) Cross section of the nanotrenches in SU-8. The topmost nanoslot opening is as narrow as 15 nm. Reprinted with permission from Kwon et al. [52]. Copyright 2009, American Vacuum Society.