Figure 3.
The surface morphology of microholes was ablated by Bessel beam with different single pulse energy and pulse numbers. (a) The microholes were ablated with Bessel Beam at 4 μJ, and pulse number were 1 × 106; (b) The microholes were ablated with Bessel Beam at 4 μJ, and pulse number were 1 × 105; (c) The microholes were ablated with Bessel Beam at 4 μJ, and pulse number were 1 × 104; (d) The microholes were ablated with Bessel Beam at 3 μJ, and pulse number were 1 × 106; (e) The microholes were ablated with Bessel Beam at 3 μJ, and pulse number were 1 × 105; (f) The microholes were ablated with Bessel Beam at 3 μJ, and pulse number were 1 × 104; (g) The microholes were ablated with Bessel Beam at 2 μJ, and pulse number were 1 × 106; (h) The microholes were ablated with Bessel Beam at 2 μJ, and pulse number were 1 × 105; (i) The microholes were ablated with Bessel Beam at 2 μJ, and pulse number were 1 × 104.