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(a) photograph of the sensor (2 × 2.3 cm2) made up of Si NWs (black color) covered by the interdigitated electrode of 100 nm Au above 5 nm of Ti. (b) Measurement of electrical resistance of the sensor exposed to 2, 5, and 30 ppm of NO2 pulses at 115 °C. (c) Sensor recovery times after 5 min of NO2 pulse at 2 ppm at 70, 100, and 115 °C. (d) Variation of the sensor resistance as a function of the NO2 concentration at 70, 100, and 115 °C.
