Figure 9.

Microfluidic sonoporation and cavitation for intracellular delivery. a) Schematics of membrane disruption using i) microbubble oscillation and ii) inertial cavitation. b) Intracellular delivery into microvessels using microbubble oscillation. Reproduced with permission.^{[ 114 ]} Copyright 2016, American Chemical Society. c) Surface acoustic wave (SAW) microbubble destruction induced cell permeabilization. Reproduced with permission.^{[ 115 ]} Copyright 2014, American Institute of Physics. d) Acoustofluidic sonoporation (a combination of acoustic pressure, shear force, and cavitation) for cell membrane discontinuity. Reproduced with permission.^{[ 117 ]} Copyright 2020, National Academy of Sciences. e) Microfluidic array for parallelized single‐cell intracellular delivery via inertial cavitation. Reproduced with permission.^{[ 119 ]} Copyright 2013, Royal Society of Chemistry. f) Laser‐induced cavitation for macromolecules intracellular delivery. Reproduced with permission.^{[ 120 ]} Copyright 2015, Springer Nature.