U11	U22	U33	U12	U13	U23
Cl1	0.02260 (17)	0.01966 (17)	0.01950 (16)	0.00008 (13)	0.00287 (13)	−0.00824 (12)
Cl2	0.02766 (18)	0.01698 (16)	0.01742 (15)	0.00127 (13)	0.00727 (13)	0.00505 (12)
Cl3	0.01596 (15)	0.01944 (17)	0.02574 (17)	0.00286 (12)	0.00760 (13)	−0.00038 (12)
Cl4	0.01995 (16)	0.02252 (18)	0.02291 (16)	−0.00783 (13)	0.00266 (13)	−0.00581 (13)
Cl5	0.02410 (18)	0.01230 (16)	0.0374 (2)	−0.00025 (13)	0.00750 (15)	0.00650 (13)
Cl6	0.0340 (2)	0.0339 (2)	0.01635 (16)	0.00063 (16)	−0.00359 (14)	0.00900 (14)
O1	0.0162 (5)	0.0248 (5)	0.0257 (5)	−0.0038 (4)	0.0037 (4)	−0.0082 (4)
O2	0.0253 (5)	0.0215 (5)	0.0197 (5)	−0.0021 (4)	0.0061 (4)	−0.0076 (4)
N1	0.0153 (5)	0.0151 (6)	0.0165 (5)	0.0019 (4)	0.0043 (4)	−0.0011 (4)
C1	0.0124 (6)	0.0151 (6)	0.0168 (6)	0.0048 (5)	0.0008 (5)	−0.0006 (5)
C2	0.0146 (6)	0.0121 (6)	0.0139 (6)	0.0031 (5)	0.0008 (5)	−0.0012 (5)
C3	0.0147 (6)	0.0129 (6)	0.0145 (6)	0.0014 (5)	0.0021 (5)	−0.0018 (5)
C4	0.0153 (6)	0.0118 (6)	0.0154 (6)	0.0020 (5)	0.0037 (5)	0.0016 (5)
C5	0.0144 (6)	0.0128 (6)	0.0138 (6)	−0.0016 (5)	0.0015 (5)	−0.0002 (5)
C6	0.0163 (6)	0.0116 (6)	0.0142 (6)	0.0007 (5)	0.0023 (5)	0.0003 (5)
C7	0.0163 (6)	0.0117 (6)	0.0177 (6)	0.0035 (5)	0.0036 (5)	0.0000 (5)
C8	0.0135 (6)	0.0129 (6)	0.0200 (6)	0.0024 (5)	0.0049 (5)	0.0037 (5)
C9	0.0146 (6)	0.0173 (6)	0.0146 (6)	0.0036 (5)	0.0021 (5)	0.0049 (5)
C10	0.0189 (7)	0.0217 (7)	0.0220 (7)	−0.0003 (6)	0.0100 (5)	−0.0032 (5)
C11	0.0262 (7)	0.0211 (7)	0.0172 (6)	−0.0055 (6)	0.0067 (6)	−0.0023 (5)
C12	0.0274 (7)	0.0209 (7)	0.0178 (6)	−0.0054 (6)	0.0037 (6)	−0.0022 (5)