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. 1994 Sep-Oct;99(5):641–671. doi: 10.6028/jres.099.059

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The Journal of Research of the National Institute of Standards and Technology is a publication of the U.S. Government. The papers are in the public domain and are not subject to copyright in the United States. Articles from J Res may contain photographs or illustrations copyrighted by other commercial organizations or individuals that may not be used without obtaining prior approval from the holder of the copyright.

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Fig. 14 — SEM sharpness comparison using a special etehed and coated biphasic glass specimen. (a) Instrument demonstrating good low accelerating voltage resolution: (b) instrument demonstrating poorer resolution.