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. 1994 Sep-Oct;99(5):641–671. doi: 10.6028/jres.099.059

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The Journal of Research of the National Institute of Standards and Technology is a publication of the U.S. Government. The papers are in the public domain and are not subject to copyright in the United States. Articles from J Res may contain photographs or illustrations copyrighted by other commercial organizations or individuals that may not be used without obtaining prior approval from the holder of the copyright.

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Fig. 8 — Graphical comparison of the calculated resolution capabilities of different designs and applications of field emission scanning electron microscopes. (a) Standard “pinhole” type final lens with the secondary electron detector in the “normal” location within the specimen chamber; (b) extended-field lens with the electron detector in the “normal” location; (c) extended-field lens with the detector positioned above the lens; (d) in-lens ultra-high resolution instrument (courtesy of Hitachi Scientific Instruments).