Table 2.

SEM achievable resolution

Detector position	Accelerating voltage	tn-Lens FE	Extended field FE	Post-Lens FE	Post-Lens LaB6	Post-Lens tungslen
Upper	30.0 kV	0.7 nm	1.5 nm
	1.0 kV	3.5 nm	4.5 nm
Lower	30.0 kV			1.5 nm	2.5 nm	3.5 nm
	1.0 kV			5.0 nm	7.5 nm	10.0 nm