Fig. 5.

Wavefront RMS of the dynamic wavefront distortions for different maximum scan amplitudes of the 15.1 kHz resonant scanner, illustrating how the mirror distortion depends on the angular displacement, and not on the oscillation amplitude.

Wavefront RMS of the dynamic wavefront distortions for different maximum scan amplitudes of the 15.1 kHz resonant scanner, illustrating how the mirror distortion depends on the angular displacement, and not on the oscillation amplitude.