|
|
bounded circular smooth domain |
|
d
|
distance between the two parallel disks |
|
r
|
radial coordinate |
|
R
|
radius of the device |
|
|
profile of the membrane |
|
V
|
external electrical voltage |
|
T
|
radial mechanical tension of the membrane at rest |
|
|
parameter depending on V and T
|
|
|
parameter that weighs the fringing field effect |
|
|
electrostatic field |
|
|
amplitude of the electrostatic field |
|
|
mean curvature |
|
|
critical security distance |
|
|
factor of proportionality |
|
|
permittivity of the free space |
|
|
electrostatic force |
|
|
electrostatic pressure |
|
p
|
mechanical pressure |
|
|
displacement in the center of the membrane |
|
|
electrostatic capacitance |
|
|
density |
|
h
|
thickness |
|
Y
|
Young modulus |
|
|
Poisson ratio |
|
D
|
stiffness coefficient |
|
|
function of proportionality |
|
,
|
auxiliary functions |
|
k
|
constant of proportionality between p and
|
|
H
|
|
| FEM |
Finite Element Method |
|
|
tolerance for Brent procedure |
|
|
tolerance for Keller–Box Scheme |
|
|
Runge–Kutta Methods |
|
|
Green function |