Figure 2.

(a) Operation of 5‐step cycle within on‐chip pump. Microphotographies of the valve actuation pattern of the peristaltic pump. At rest, the three valves are close to prevent leakage. When pumping, the fluid is allowed to enter the valve region and is sequentially pushed in the output direction. At least one valve is always close during the pumping sequence to prevent backflow. Scale bar: 200 µm. (b) Flow rate curve. The on‐chip pump's performance was investigated by correlating the driven frequency with the flow rate generated at a fixed back pressure