U11	U22	U33	U12	U13	U23
C1	0.0158 (5)	0.0212 (5)	0.0187 (5)	−0.0008 (4)	0.0054 (4)	−0.0001 (4)
C2	0.0184 (5)	0.0233 (6)	0.0203 (6)	−0.0022 (4)	0.0074 (5)	−0.0026 (4)
C3	0.0192 (5)	0.0237 (6)	0.0179 (5)	0.0009 (4)	0.0054 (4)	−0.0003 (4)
C4	0.0166 (5)	0.0198 (5)	0.0175 (5)	−0.0002 (4)	0.0047 (4)	0.0010 (4)
C5	0.0157 (5)	0.0195 (5)	0.0193 (5)	−0.0003 (4)	0.0034 (4)	0.0016 (4)
C6	0.0188 (5)	0.0220 (5)	0.0209 (6)	0.0006 (4)	0.0081 (4)	0.0018 (4)
C7	0.0203 (5)	0.0198 (5)	0.0177 (6)	0.0005 (4)	0.0061 (4)	0.0010 (4)
C8	0.0171 (5)	0.0211 (5)	0.0189 (5)	−0.0002 (4)	0.0034 (4)	0.0003 (4)
C9	0.0173 (5)	0.0223 (5)	0.0193 (5)	−0.0007 (4)	0.0061 (4)	0.0006 (4)
C10	0.0197 (5)	0.0229 (5)	0.0172 (5)	−0.0006 (4)	0.0061 (4)	0.0006 (4)
C11	0.0210 (5)	0.0222 (5)	0.0192 (5)	0.0008 (4)	0.0070 (4)	0.0011 (4)
C12	0.0253 (6)	0.0365 (7)	0.0180 (6)	0.0003 (5)	0.0092 (5)	0.0008 (5)
C13	0.0185 (6)	0.0295 (6)	0.0192 (5)	−0.0006 (4)	0.0053 (4)	0.0002 (4)
C14	0.0221 (6)	0.0462 (8)	0.0262 (6)	−0.0023 (5)	0.0121 (5)	−0.0036 (5)
N1	0.0184 (5)	0.0310 (5)	0.0141 (5)	−0.0001 (4)	0.0054 (4)	−0.0023 (4)
N2	0.0149 (5)	0.0304 (5)	0.0167 (5)	0.0025 (4)	0.0056 (4)	0.0005 (4)
N3	0.0174 (5)	0.0219 (5)	0.0181 (5)	−0.0007 (3)	0.0053 (4)	−0.0001 (3)
N4	0.0153 (5)	0.0270 (5)	0.0176 (5)	−0.0005 (3)	0.0055 (4)	0.0017 (4)
O1	0.0192 (4)	0.0439 (5)	0.0244 (4)	−0.0026 (4)	0.0108 (3)	−0.0066 (4)
O2	0.0190 (4)	0.0441 (5)	0.0169 (4)	0.0043 (4)	0.0032 (3)	−0.0004 (3)
O3	0.0178 (4)	0.0344 (5)	0.0161 (4)	−0.0001 (3)	0.0062 (3)	0.0014 (3)
O4	0.0211 (4)	0.0510 (6)	0.0187 (4)	−0.0024 (4)	0.0056 (3)	−0.0028 (4)
O5	0.0204 (4)	0.0370 (5)	0.0172 (4)	0.0008 (3)	0.0071 (3)	0.0015 (3)
O6	0.0175 (4)	0.0853 (8)	0.0252 (5)	−0.0085 (5)	0.0069 (4)	−0.0130 (5)
O7	0.0190 (4)	0.0498 (6)	0.0193 (4)	−0.0038 (4)	0.0080 (3)	−0.0038 (4)
OW1	0.031 (3)	0.056 (3)	0.058 (3)	0.001 (2)	0.024 (2)	0.004 (2)