Table 5.
XPS results for the AO-exposed and unexposed PI films.
| Samples | Relative Atomic Concentration (%) | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Unexposed Samples | AO-exposed Samples | |||||||||
| Si2p | C1s | O1s | N1s | F1s | Si2p | C1s | O1s | N1s | F1s | |
| 6FPI-0 | 0 | 75.74 | 12.44 | 2.58 | 6.58 | 0 | 70.81 | 18.03 | 2.62 | 4.54 |
| 6FPI-5 | 5.09 | 66.58 | 19.08 | 3.67 | 4.39 | 18.34 | 35.80 | 40.43 | 1.65 | 3.78 |
| 6FPI-10 | 6.24 | 67.07 | 16.07 | 2.09 | 8.28 | 20.08 | 31.16 | 44.15 | 1.14 | 3.47 |
| 6FPI-15 | 3.14 | 76.48 | 13.57 | 1.64 | 4.44 | 17.87 | 36.74 | 40.18 | 1.74 | 3.47 |
| 6FPI-20 | 2.96 | 64.63 | 18.08 | 3.52 | 7.56 | 21.25 | 28.07 | 46.51 | 1.06 | 3.10 |
| 6FPI-25 | 9.43 | 66.55 | 18.74 | 1.92 | 3.36 | 17.30 | 39.29 | 38.33 | 1.84 | 3.24 |