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3D profiles of fabricated extended nanochannels scanned by an optical profiler (WYKO NT9100A). Results for fabrication with (A) 1700 nm resist thickness, 1000 nm exposed channel width, and 0.5 μs exposure; (B) 1900 nm resist thickness, 2500 nm exposed channel width, and 0.4 μs exposure; and (C) 2300 nm resist thickness, 3000 nm exposed channel width, and 1.0 μs exposure.
