Table 1.

Comparison between ScAlN, AlN and PbZr_xTi_1−xO₃ (PZT) piezoelectric materials.

Performance	Sc0.41Al0.59N [11,27,32]	AlN [11,26]	PZT [11,26]
Material Category	Non-ferroelectric		Ferroelectric
Piezoelectric Coefficient, $e_{31,f}$ [C/m2]	~3.16	~1.1	~21
Relative Permittivity, ${\epsilon }_r$	16.7	10	1300
Figure of Merit (FoM), $e_{31,f}^2/{\epsilon }_0{\epsilon }_r$ [GPa]	67.5	13.7	38.3
Highest DC Driving Voltage [V]	±200	±200	±30
Directionality	Bidirectional		Unidirectional
CMOS compatibility	Yes		No