Table 2.

Geometrical parameter specifications of mirror devices A and B.

Parameter	Device A	Device B
Mirror length, lA or lB [μm]	1000	10,000
Thickness of the mirror plate, tA or tB [μm]	10	100
Length of the pillar, lp [μm]	-	250
Height of the pillar, hp [μm]	-	3500
Length of the PM actuator, l1 [μm]	4025
Fixed boundary width of the PM actuator, w0 [μm]	700
Lower width of the PM actuator, w1 [μm]	3035
Upper width of the PM actuator, w2 [μm]	880
Length of the meandering spring, lm [μm]	370
Width of the meandering spring, wm [μm]	20
Spacing pitch of the meandering spring, wp [μm]	120
Length of the torsion bar, lb [μm]	390
Width of the torsion bar, wb [μm]	20
Length of the connecting bar, lc [μm]	410
Width of the connecting bar, wc [μm]	20